JPH0451642U - - Google Patents
Info
- Publication number
- JPH0451642U JPH0451642U JP9483390U JP9483390U JPH0451642U JP H0451642 U JPH0451642 U JP H0451642U JP 9483390 U JP9483390 U JP 9483390U JP 9483390 U JP9483390 U JP 9483390U JP H0451642 U JPH0451642 U JP H0451642U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- diaphragm portion
- silicon substrate
- bridge circuit
- diaphragm part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9483390U JPH0451642U (en]) | 1990-09-10 | 1990-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9483390U JPH0451642U (en]) | 1990-09-10 | 1990-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0451642U true JPH0451642U (en]) | 1992-04-30 |
Family
ID=31833088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9483390U Pending JPH0451642U (en]) | 1990-09-10 | 1990-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451642U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0264430A (ja) * | 1988-08-31 | 1990-03-05 | Hitachi Ltd | 半導体圧力変換装置 |
-
1990
- 1990-09-10 JP JP9483390U patent/JPH0451642U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0264430A (ja) * | 1988-08-31 | 1990-03-05 | Hitachi Ltd | 半導体圧力変換装置 |
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